New techniques of implantation for near-term applications
- 1 October 1981
- journal article
- Published by Elsevier in Nuclear Instruments and Methods in Physics Research
- Vol. 189 (1) , 135-140
- https://doi.org/10.1016/0029-554x(81)90135-x
Abstract
No abstract availableThis publication has 1 reference indexed in Scilit:
- Molecular effect in the expansion of ion implanted InSbNuclear Instruments and Methods, 1981