Hot electron induced hydrogen compensation of boron doped silicon resulting from emitter-base breakdown
- 1 January 1992
- proceedings article
- Published by Institute of Electrical and Electronics Engineers (IEEE)
Abstract
Large positive drifts in the emitter-base breakdown voltage (BVebo) by as much as 1.5 volts have been observed on devices utilizing blanket deposited silicon nitride layers. The large magnitude of the drift has been explained by the electrical neutralization of boron by the formation of boron-hydrogen bonds when the emitter-base junction is avalanched. The blanket nitride layer acts as a source of hydrogen as well as a barrier which traps hydrogen in the oxide under the nitride layer.Keywords
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