The dynamics of reactive ion sputtering of SnSb and InSn alloys in an ArO2 atmosphere
- 1 February 1981
- journal article
- Published by Elsevier in Thin Solid Films
- Vol. 76 (3) , 283-287
- https://doi.org/10.1016/0040-6090(81)90699-4
Abstract
No abstract availableKeywords
This publication has 3 references indexed in Scilit:
- Electrical properties of non-stoichiometric tin oxide films obtained by the d.c. reactive sputtering methodThin Solid Films, 1980
- Phase composition of SnOx thin films obtained by reactive d.c. sputteringThin Solid Films, 1979
- The deposition rate of metallic thin films in the reactive sputtering processThin Solid Films, 1975