Electron and heavy particle kinetics in a low-pressure nitrogen glow discharge
- 1 August 1997
- journal article
- Published by IOP Publishing in Plasma Sources Science and Technology
- Vol. 6 (3) , 361-372
- https://doi.org/10.1088/0963-0252/6/3/013
Abstract
A detailed kinetic model is used to investigate the mechanisms for ionization, dissociation and atomic re-association in a low-pressure positive column. The approach is based on the self-consistent solutions to the electron Boltzmann equation coupled to a system of rate balance equations for the levels, the electronically excited states of and the and ions. The maintenance electric field is self-consistently determined from the continuity equations for electrons and ions. The model provides a satisfactory explanation of measurements conducted in these conditions, in the range p = 0.6 - 2.5 Torr and I = 10 - 100 mA, for the reduced electric field and the concentrations of N atoms and and states. The rate coefficients and are derived here for the two reactions leading to associative ionization by collisions between electronic metastables and , respectively. The dissociation due to the vibration - vibration (V - V) and vibration - translation (V - T) energy exchanges is shown to represent only a minor contribution for the total rate of dissociation, in opposition to previous studies, due to the effects of fast V - T exchanges associated with - N collisions. Finally, it is shown that the reaction does not constitute an effective depopulating mechanism of N atoms as most of the N atoms so created are reconverted to the N by collisions on the wall and quenching.Keywords
This publication has 50 references indexed in Scilit:
- A spectroscopic study of active species in DC and HF flowing discharges in - and Ar - - mixturesPlasma Sources Science and Technology, 1996
- Non-equilibrium coupled kinetics in stationary N2-O2dischargesJournal of Physics D: Applied Physics, 1995
- Non-equilibrium electronic and vibrational kinetics in H2-N2and H2dischargesPlasma Sources Science and Technology, 1995
- Experimental and theoretical investigation of a N2-O2DC flowing glow dischargeJournal of Physics D: Applied Physics, 1995
- Kinetic model of a low-pressure N/sub 2/-O/sub 2/ flowing glow dischargeIEEE Transactions on Plasma Science, 1995
- Electron and vibrational kinetics in an N2-H2glow discharge with application to surface processesJournal of Physics D: Applied Physics, 1993
- Dissociation rate and N (4S) atom concentrations in a N2 glow-dischargeChemical Physics, 1991
- Electron energy distribution functions and vibrational population densities of excited electronic states in DC discharges through nitrogenJournal of Physics D: Applied Physics, 1990
- Electron energy distribution functions under N2 discharge and post-discharge conditions: A self-consistent approachChemical Physics, 1988
- Coupled electron energy and vibrational distribution functions in stationary N2dischargesJournal of Physics D: Applied Physics, 1986