Fast diffusion of interstitial deuterium in amorphous silicon
- 1 December 1987
- journal article
- Published by Elsevier in Journal of Non-Crystalline Solids
- Vol. 97-98, 353-356
- https://doi.org/10.1016/0022-3093(87)90084-6
Abstract
No abstract availableKeywords
This publication has 1 reference indexed in Scilit:
- A SIMS analysis of deuterium diffusion in hydrogenated amorphous siliconApplied Physics Letters, 1978