High Rate Epitaxial Growth of Diamond on Si(100) by DC Plasma CVD

This publication has 16 references indexed in Scilit:

• Texture formation in polycrystalline diamond films
  Journal of Applied Physics, 1990
• Selective nucleation and growth of diamond particles by plasma-assisted chemical vapor deposition
  Applied Physics Letters, 1989
• Growth of textured diamond films on foreign substrates from attached seed crystals
  Applied Physics Letters, 1989
• Diamond synthesis using an oxygen-acetylene torch
  Materials Letters, 1988
• Epitaxial growth of diamond on diamond substrate by plasma assisted CVD
  Applied Surface Science, 1988
• High rate synthesis of diamond by dc plasma jet chemical vapor deposition
  Applied Physics Letters, 1988
• Chemical vapour deposition of diamond in RF glow discharge
  Journal of Materials Science Letters, 1985
• Growth of diamond thin films by electron assisted chemical vapor deposition
  Applied Physics Letters, 1985
• Diamond synthesis from gas phase in microwave plasma
  Journal of Crystal Growth, 1983
• A Model for Dielectric Breakdown in Plasma-Polymerized Styrene Thin Films
  Japanese Journal of Applied Physics, 1982