A common framework for soft and hard breakdown in ultrathin oxides based on the theory of point contact conduction
- 30 September 1999
- journal article
- Published by Elsevier in Microelectronic Engineering
- Vol. 48 (1-4) , 171-174
- https://doi.org/10.1016/s0167-9317(99)00364-0
Abstract
No abstract availableKeywords
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