Microcrystalline structure of poly-Si films prepared by cathode-type r.f. glow discharge
- 1 February 1995
- journal article
- Published by Elsevier in Thin Solid Films
- Vol. 256 (1-2) , 234-239
- https://doi.org/10.1016/0040-6090(94)09291-5
Abstract
No abstract availableKeywords
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