A combination of atomic force microscopy and secondary ion mass spectrometry for investigation of AlxGa1?xAs/GaAs superlattices
- 1 January 1993
- journal article
- Published by Springer Nature in Analytical and Bioanalytical Chemistry
- Vol. 345 (8) , 615-617
- https://doi.org/10.1007/bf00325813
Abstract
No abstract availableKeywords
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