8/spl times/8 independently addressable vertical-cavity surface-emitting laser diode arrays grown by MOCVD
- 1 August 1994
- journal article
- Published by Institute of Electrical and Electronics Engineers (IEEE) in IEEE Photonics Technology Letters
- Vol. 6 (8) , 918-920
- https://doi.org/10.1109/68.313051
Abstract
The first 8/spl times/8 independently addressable vertical-cavity surface-emitting laser diode arrays have been grown by MOCVD. They showed not only good I-L characteristics, such as low threshold current and voltage, but excellent uniformity of threshold current (3.39/spl plusmn/O.11 mA) and lasing wavelength (850.93/spl plusmn/0.28 nm). These results shows that the high-productivity of MOCVD growth technique is applicable to the fabrication of such laser diode arrays.Keywords
This publication has 11 references indexed in Scilit:
- Low-threshold current low-voltage vertical-cavity surface-emitting lasers with low-Al-content p-type mirrors grown by MOCVDIEEE Photonics Technology Letters, 1992
- Fabrication of low threshold voltage microlasersElectronics Letters, 1992
- Progress in planarized vertical-cavity surface-emitting laser devices and arraysPublished by SPIE-Intl Soc Optical Eng ,1991
- GaAs vertical-cavity surface emitting lasers fabricated by reactive ion etchingIEEE Photonics Technology Letters, 1991
- Uniform 64×1 arrays of individually-addressed vertical cavity top surface emitting lasersElectronics Letters, 1991
- Low series resistance high-efficiency GaAs/AlGaAs vertical-cavity surface-emitting lasers with continuously graded mirrors grown by MOCVDIEEE Photonics Technology Letters, 1991
- GaAs buried heterostructure vertical cavity top-surface emitting lasersIEEE Journal of Quantum Electronics, 1991
- Independently addressable InGaAs/GaAs vertical-cavity surface-emitting laser arraysElectronics Letters, 1991
- High-power cw vertical-cavity top surface-emitting GaAs quantum well lasersApplied Physics Letters, 1990
- Low threshold planarized vertical-cavity surface-emitting lasersIEEE Photonics Technology Letters, 1990