Mechanical System for Multiple Thin Film Deposition
- 1 October 1966
- journal article
- Published by AIP Publishing in Review of Scientific Instruments
- Vol. 37 (10) , 1378-1380
- https://doi.org/10.1063/1.1719986
Abstract
No abstract availableKeywords
This publication has 5 references indexed in Scilit:
- Modular Electron Beam Source for Thin Film DepositionReview of Scientific Instruments, 1966
- Simplified Technique for use in Multiple Thin-Film Deposition SystemsReview of Scientific Instruments, 1964
- An automated experimental vacuum deposition systemVacuum, 1964
- A masking jig for multiple film depositionJournal of Scientific Instruments, 1963
- Simple Arrangement for Evaporating Multilayer Films Through Different Masks in Ultrahigh VacuumReview of Scientific Instruments, 1961