Influence of oxygen on the formation of refractory metal silicides
- 1 June 1986
- journal article
- Published by Elsevier in Thin Solid Films
- Vol. 140 (1) , 59-70
- https://doi.org/10.1016/0040-6090(86)90159-8
Abstract
No abstract availableThis publication has 28 references indexed in Scilit:
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