Polymerization of para‐xylylene derivatives (parylene polymerization). II. Heat effects during deposition of parylene C at different temperatures
- 1 August 1985
- journal article
- research article
- Published by Wiley in Journal of Polymer Science: Polymer Chemistry Edition
- Vol. 23 (8) , 2255-2277
- https://doi.org/10.1002/pol.1985.170230815
Abstract
No abstract availableKeywords
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