The electron beam fabrication of small geometry transistors
- 31 May 1967
- journal article
- Published by Elsevier in Solid-State Electronics
- Vol. 10 (5) , 491-496
- https://doi.org/10.1016/0038-1101(67)90048-2
Abstract
No abstract availableKeywords
This publication has 2 references indexed in Scilit:
- Automatic positioning of device electrodes using the scanning electron microscopeIEEE Transactions on Electron Devices, 1965
- Application of the scanning electron microscope to semiconductor device structuresMicroelectronics Reliability, 1965