Design and performance of cryogenic wafer prober

1 January 1986

journal article
research article
Published by AIP Publishing in Review of Scientific Instruments

Vol. 57 (1) , 115-118
https://doi.org/10.1063/1.1139131

Abstract

This paper describes a probing system to test a wafer immersed in liquid helium. This system is intended to improve the following three functions in comparison with conventional systems: (1) measurement of fast rise‐time electrical signals, (2) quick release of flux trapping with small loss of liquid helium, (3) facility in exchanging wafers. It was observed that signals with 2‐ns rise time could transmit through the system, the release of flux trapping could be achieved in several minutes with negligible helium loss using a cryoinsert with a closable hole at its bottom, and wafers could be exchanged similarly.

Keywords

This publication has 1 reference indexed in Scilit:

Cryogenic wafer prober for Josephson devices
IEEE Transactions on Magnetics, 1983