Characterization of diamond-like carbon films by fine scale indentation measurements
- 25 March 1992
- journal article
- Published by Elsevier in Diamond and Related Materials
- Vol. 1 (2) , 355-359
- https://doi.org/10.1016/0925-9635(92)90057-u
Abstract
No abstract availableKeywords
This publication has 3 references indexed in Scilit:
- Physical properties of carbon films produced using a hybrid physical vapour deposition techniqueSurface and Coatings Technology, 1991
- Limits to the hardness testing of films thinner than 1 μmThin Solid Films, 1987
- A review of the present state of art in hard coatings grown from the vapor phaseJournal of Vacuum Science & Technology A, 1986