Fabrication of thin film interdigital transducers for surface acoustic wave devices operating at gigahertz frequencies
- 17 September 1979
- journal article
- Published by Elsevier in Thin Solid Films
- Vol. 62 (1) , 109-114
- https://doi.org/10.1016/0040-6090(79)90388-2
Abstract
No abstract availableKeywords
This publication has 2 references indexed in Scilit:
- Polymethyl Methacrylate as an Electron Sensitive ResistJournal of the Electrochemical Society, 1973
- A High-Yield Photolithographic Technique for Surface Wave DevicesJournal of the Electrochemical Society, 1971