The Structural Properties of Sputtered Zinc Oxide
- 1 January 1985
- journal article
- Published by Springer Nature in MRS Proceedings
Abstract
No abstract availableKeywords
This publication has 5 references indexed in Scilit:
- Aspects for the design of sputtering systemsVacuum, 1983
- Deposition rate dependence of the critical optimization temperature for thin film properties: Evidence for the disordered area reevaporation mechanismJournal of Vacuum Science and Technology, 1982
- Scattering loss reduction in ZnO optical waveguides by laser annealingApplied Physics Letters, 1981
- Quality of vacuum-deposited filmsNature, 1975
- Influence of apparatus geometry and deposition conditions on the structure and topography of thick sputtered coatingsJournal of Vacuum Science and Technology, 1974