Superconducting YBaCuO thin films from excimer laser evaporation without post-annealing
- 1 October 1990
- journal article
- Published by IOP Publishing in Superconductor Science and Technology
- Vol. 3 (10) , 497-499
- https://doi.org/10.1088/0953-2048/3/10/004
Abstract
Superconducting YBaCuO thin films have been prepared by KrF laser evaporation of superconducting YBaCuO targets in 0.3 Torr oxygen and subsequent deposition onto monocrystalline SrTiO3 substrates ((100) plane), which were heated to 650, 540 or 400 degrees C and irradiated during deposition by a CW CO2 laser. By this method, post-annealing of the deposited film was not necessary.Keywords
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