High Spatial Resolution Elemental Mapping of Multilayers Using a Field Emission Transmission Electron Microscope Equipped with an Imaging Filter
- 1 November 1994
- journal article
- Published by IOP Publishing in Japanese Journal of Applied Physics
- Vol. 33 (11B) , L1642
- https://doi.org/10.1143/jjap.33.l1642
Abstract
Elemental mapping with about 1 nm spatial resolution has been achieved using a field emission transmission electron microscope (FE-TEM) equipped with an imaging filter. Chromium mapping is carried out with the Cr r m L 2,3 core-loss edge (575 eV). Chromium layers a few nanometers in thickness can be clearly observed. The obtained thicknesses are compared with results of X-ray reflectivity, and they show good agreement.Keywords
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