Cathode etching rate in abnormal glow discharges
- 1 June 1989
- journal article
- Published by Springer Nature in Applied Physics A
- Vol. 48 (6) , 573-574
- https://doi.org/10.1007/bf00617859
Abstract
No abstract availableKeywords
This publication has 5 references indexed in Scilit:
- Energy transfer processes in glow dischargesJournal of Vacuum Science & Technology A, 1986
- Energies of particles at the cathode of a glow dischargeVacuum, 1984
- Energy distributions of particles striking the cathode in a glow dischargePhysical Review A, 1983
- A statistical model of sputteringJournal of Applied Physics, 1979
- Energetic binary collisions in rare gas plasmasJournal of Vacuum Science and Technology, 1979