Micro-machined array probe card
- 1 January 1992
- proceedings article
- Published by Institute of Electrical and Electronics Engineers (IEEE)
- p. 509-512
- https://doi.org/10.1109/iedm.1992.307412
Abstract
A membrane probe card designed for high speed, high pin count testing has been fabricated with conventional IC technology on a silicon wafer and its functionality demonstrated. A novel method of breaking down interfacial oxide, as a replacement for mechanical scrubbing, is proposed and demonstrated. The probe card can consistently provide contact resistance of <2 Omega , has greatly reduced parasitics, is capable of elevated temperature testing, and offers controlled impedance striplines of 50 Omega to the probe tips.Keywords
This publication has 2 references indexed in Scilit:
- Membrane probe card technology (the future for higher performance wafer test)Published by Institute of Electrical and Electronics Engineers (IEEE) ,2003
- Array probe cardPublished by Institute of Electrical and Electronics Engineers (IEEE) ,2003