Static friction and surface roughness studies of surface micromachined electrostatic micromotors using an atomic force/friction force microscope
- 1 July 2001
- journal article
- Published by American Vacuum Society in Journal of Vacuum Science & Technology A
- Vol. 19 (4) , 1777-1785
- https://doi.org/10.1116/1.1353539
Abstract
No abstract availableThis publication has 13 references indexed in Scilit:
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