Preparation of hydrogenated amorphous Si-C alloy films and their properties
- 1 July 1984
- journal article
- Published by Elsevier in Thin Solid Films
- Vol. 117 (1) , 59-70
- https://doi.org/10.1016/0040-6090(84)90192-5
Abstract
No abstract availableKeywords
Funding Information
- Ministry of Education, Culture, Sports, Science and Technology
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