NMR and IR Studies on Hydrogenated Amorphous Si1-xCx Films
- 1 March 1982
- journal article
- Published by IOP Publishing in Japanese Journal of Applied Physics
- Vol. 21 (3A) , L176
- https://doi.org/10.1143/jjap.21.l176
Abstract
NMR and IR studies have been carried out on glow-discharge-deposited a-Si1-x C x :H films. The hydrogen content increases with an increase in x up to 0.4 mainly in gathered form contributing to the broad component of the NMR line. By combining the NMR and IR results, the proportionality between the number of H bonded to C and the intensity of IR absorption due to the C–H stretching mode vibration is ascertained. The proportionality constant is found to be A str C–H=1.7×1021 cm-2.Keywords
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