Suppression of notching by lowering the bias frequency in electron cyclotron resonance plasma with a divergent magnetic field
- 1 May 1998
- journal article
- Published by American Vacuum Society in Journal of Vacuum Science & Technology A
- Vol. 16 (3) , 1588-1593
- https://doi.org/10.1116/1.581192
Abstract
No abstract availableThis publication has 7 references indexed in Scilit:
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