Peculiarities of the 16O(α, α)16O 3.045 Me V resonance scattering and its application to investigation of oxygen in silicon
- 1 November 1993
- journal article
- Published by Elsevier in Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
- Vol. 83 (3) , 311-318
- https://doi.org/10.1016/0168-583x(93)95848-y
Abstract
No abstract availableKeywords
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