Electron Energy Distribution in Multicusp-Type ECR Plasma
- 1 November 1989
- journal article
- Published by IOP Publishing in Japanese Journal of Applied Physics
- Vol. 28 (11R)
- https://doi.org/10.1143/jjap.28.2289
Abstract
A multicusp-type electron cyclotron resonance (ECR) plasma device is built with SmCo magnets and 2.45 GHz, TE11 circular-mode microwaves. DC bias can be superimposed between anode bars and a grid placed near the end surface to control the plasma. Electron energy distribution is measured by a Langmuir probe and a gridded analyzer. The plasma density is about 2×1010 cm-3 and 4×1010 cm-3 at the center and the cusp region, respectively. The equivalent electron temperature, 2/3 times the mean energy, is 4 eV and 15 eV at respective regions. The high-energy tail extends to above 100eV.Keywords
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