Sputtering of elemental metals by Ar cluster ions
- 1 January 1997
- journal article
- Published by Elsevier in Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
- Vol. 121 (1-4) , 459-463
- https://doi.org/10.1016/s0168-583x(96)00541-1
Abstract
No abstract availableKeywords
This publication has 13 references indexed in Scilit:
- Surface processing by gas cluster ion beams at the atomic (molecular) levelJournal of Vacuum Science & Technology A, 1996
- SPUTTERING WITH GAS CLUSTER-ION BEAMSSurface Review and Letters, 1996
- Gas cluster ion beam equipments for industrial applicationsNuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 1995
- Surface modification with gas cluster ion beamsNuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 1993
- Molecular-dynamics simulations of collisions between energetic clusters of atoms and metal substratesPhysical Review B, 1992
- Magic numbers in mass spectra of large van der Waals clustersJournal of the Chemical Society, Faraday Transactions, 1990
- Mass spectrometric evidence for icosahedral structure in large rare gas clusters: Ar, Kr, XeThe Journal of Chemical Physics, 1989
- Larger cluster ion impact phenomenaChemical Reviews, 1986
- Consistent Theory of Sputtering of Solid Targets by Ion Bombardment Using Power Potential LawJapanese Journal of Applied Physics, 1973
- Theory of Sputtering. I. Sputtering Yield of Amorphous and Polycrystalline TargetsPhysical Review B, 1969