Cell handling and characterization using micron and submicron electrode arrays: state of the art and perspectives of semiconductor microtools

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Abstract
The manipulation and characterization of single microparticles and living cells is possible by the application of high-frequency electric fields using ultra-microelectrode arrays fabricated on planar silicon or glass wafers using semiconductor technology. Devices can be developed for cell trapping, manipulation and cultivation. Electrode miniaturization and partial insulation allows the use of highly conductive media, such as cell culture or physiological solutions. Normal growth of animal cell occurs in the high field (>50 kV min-1) between continuously energized multielectrodes. This opens up new biomedical applications. These microtools may be combined to develop cell separators, microsensors and controlled-biocompatibility surfaces.