Gallium phosphide microlenses by mass transport
- 10 July 1989
- journal article
- Published by AIP Publishing in Applied Physics Letters
- Vol. 55 (2) , 97-99
- https://doi.org/10.1063/1.102099
Abstract
Arrays of high quality refractive microlenses have been formed in GaP substrates by mesa etching followed by a heat treatment in which the multistep mesas were smoothed due to surface energy minimization. A smooth lens surface and an accurately controlled lens profile have been obtained. Microlenses of 130 μm diameter and 200 μm focal length have been used to collimate the outputs of GaInAsP/InP and GaAs/GaAlAs diode lasers and have yielded a nearly diffraction-limited beam divergence of 0.68°.Keywords
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