A micromachined mass-flow sensor with integrated electronics on GaAs
- 30 November 1994
- journal article
- Published by Elsevier in Sensors and Actuators A: Physical
- Vol. 45 (2) , 91-94
- https://doi.org/10.1016/0924-4247(94)0821x-h
Abstract
No abstract availableThis publication has 10 references indexed in Scilit:
- Micromechanically structurized sensors on GaAs: An integrated anemometerMicroelectronic Engineering, 1992
- An integrated mass flow sensor with on-chip CMOS interface circuitryIEEE Transactions on Electron Devices, 1992
- AlGaAs/GaAs HBT for high-temperature applicationsIEEE Transactions on Electron Devices, 1992
- High-sensivity 2-D flow sensor with an etched thermal isolation structureSensors and Actuators A: Physical, 1990
- An electronic wind meter based on a silicon flow sensorSensors and Actuators A: Physical, 1990
- A new GaAs technology for stable FETs at 300 degrees CIEEE Electron Device Letters, 1989
- Fast-response silicon flow sensor with an on-chip fluid temperature sensing elementIEEE Transactions on Electron Devices, 1986
- Selective Etching Characteristics of Peroxide/Ammonium‐Hydroxide Solutions for GaAs / Al0.16Ga0.84AsJournal of the Electrochemical Society, 1982
- Monolithic integrated direction-sensitive flow sensorIEEE Transactions on Electron Devices, 1982
- Integrated silicon anemometerElectronics Letters, 1974