EFFECTS OF THERMAL RADIATION ON MOMENTUM, HEAT, AND MASS TRANSFER IN A HORIZONTAL CHEMICAL VAPOR DEPOSITION REACTOR

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Abstract
Numerical solutions of the conservation of mass, momentum, and energy equations in a chemical vapor deposition reactor have been obtained for three different wail boundary conditions. The idealized cases of isothermal and adiabatic reactor walls were compared with the more physically realistic case of a wall that interacts radiatively and convectively with its surroundings. The thermal radiation analysis includes a two-band model for the nongray, semitransparent, quartz walls of the reactor. It is coupled with convection inside and outside the reactor. The wall boundary conditions are shown to have a substantial effect on the velocity and temperature fields in the reactor. The importance of thermal radiation has been demonstrated by comparing gallium arsenide growth rates predicted by the numerical model with experimental values.