Distortion of sputtering spot patterns of single crystals due to incomplete condensation
- 1 January 1974
- journal article
- research article
- Published by Taylor & Francis in Radiation Effects
- Vol. 21 (3) , 141-144
- https://doi.org/10.1080/00337577408241453
Abstract
It is shown experimentally as well as theoretically that sputtering spot patterns of single crystals can seriously be influenced by the condensation process on the collector. This results in erroneous representation of the preferential emission regarding both the ejection characteristic and the intensity ratio of different ejection directions.Keywords
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