Sputtering Experiments with 1- to 5-keV Ar+ Ions. II. Monocrystalline Targets of Al, Cu, and Au
- 1 June 1967
- journal article
- conference paper
- Published by AIP Publishing in Journal of Applied Physics
- Vol. 38 (7) , 2969-2973
- https://doi.org/10.1063/1.1710034
Abstract
Sputtering yields have been measured during normally incident 1‐ to 5‐keV Ar+ ion irradiation of polycrystalline Au, 〈100〉, 〈110〉, and 〈111〉 Au monocrystals, a 〈111〉 Al monocrystal, and several 〈0kl〉 Cu monocrystals of previously unreported orientations. Onderdelinden's transparency model is found to account satisfactorily for the orientation dependence of the yields of low‐index Cu, Au, and Ge crystals. The importance of the recording geometry in governing the appearance of sputtering ejection patterns is demonstrated. The so‐called 〈114〉 ejection‐pattern spots from 〈111〉 fcc crystals are attributed to assisted focusing sequences along 〈100〉, the most probable ejection direction being shifted because the last focusing ``lens'' is incomplete.This publication has 19 references indexed in Scilit:
- THE INFLUENCE OF CHANNELING ON Cu SINGLE-CRYSTAL SPUTTERINGApplied Physics Letters, 1966
- Sputtering of Single-Crystal CopperJournal of Applied Physics, 1966
- On the Mechanism of SputteringPhysica Status Solidi (b), 1966
- Effect of Elevated Temperatures on Sputtering YieldsPhysical Review B, 1965
- Physical Properties and Interrelationships of Metallic and Semimetallic ElementsPublished by Elsevier ,1964
- Higher order momentum approximations in classical collision theoryThe European Physical Journal A, 1963
- Focused collision sequences in aluminiumPhilosophical Magazine, 1962
- Atomic collision sequences in crystals of copper, silver and gold revealed by sputtering in energetic ion beamsProceedings of the Royal Society of London. Series A. Mathematical and Physical Sciences, 1961
- Collection and sputtering experiments with noble gas ionsNuclear Instruments and Methods, 1961
- Dynamics of Radiation DamagePhysical Review B, 1960