A revised process to increase efficiency and reproducibility in Cr-MIS solar cells
- 1 July 1980
- journal article
- Published by Institute of Electrical and Electronics Engineers (IEEE) in IEEE Electron Device Letters
- Vol. 1 (7) , 128-130
- https://doi.org/10.1109/edl.1980.25258
Abstract
A new process has been introduced to improve both efficiency and reproducibility of Cr-MIS solar cells. Active area efficiencies of up to 13.2% have been measured for 2 cm2cells. These improvements are due to increased silicon surface cleanliness, an optimized interfacial oxide thickness, and a one pump-down vacuum process. Spectral response data correspond to measured Jscvalues and predict a reduced diffusion length of 64 µm in Wacker poly-Si caused by grain boundary effects.Keywords
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