Crystallinity and microstructures of aluminum nitride films deposited on Si(111) substrates
- 8 March 2000
- journal article
- Published by Elsevier in Solid-State Electronics
- Vol. 44 (4) , 747-755
- https://doi.org/10.1016/s0038-1101(99)00307-x
Abstract
No abstract availableKeywords
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