Optical Emission and Microwave Field Intensity Measurements in Surface Wave-Excited Planar Plasma
- 1 March 1996
- journal article
- Published by IOP Publishing in Japanese Journal of Applied Physics
- Vol. 35 (3A) , L341-344
- https://doi.org/10.1143/jjap.35.l341
Abstract
A large-planar (22 cm diam.) high-density ( ∼2×1012 cm-3) plasma is produced in argon gas at 140 Pa by 2.45 GHz–1 kW discharges, using a microwave launcher of small slot antennas. The two-dimensional distributions of optical emission intensities as well as microwave field intensities are measured near the plasma surface irradiated with microwaves. Both the optical emission and the microwave field clearly show stationary patterns of azimuthal mode m=3 and radial mode n=3 at higher pressures (140 Pa), while a mode change to m=6 and n=2 is observed at lower pressures (44 Pa). These patterns are attributed to the excitation and absorption of standing surface waves near the cutoff layer.Keywords
This publication has 13 references indexed in Scilit:
- Spatial investigation of a large diameter microwave plasmaJournal of Physics D: Applied Physics, 1995
- Oxide Etching Using Surface Wave Coupled PlasmaJapanese Journal of Applied Physics, 1994
- Slot antenna 2.45 GHz microwave plasma sourcePlasma Sources Science and Technology, 1994
- Plasma sources based on the propagation of electromagnetic surface wavesJournal of Physics D: Applied Physics, 1991
- Resist stripping in an O2+H2O plasma downstreamJournal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, 1991
- Resist Ashing Using Surface-Wave – Produced PlasmasJournal of Microwave Power and Electromagnetic Energy, 1990
- Tube diameter and wave frequency limitations when using the electro magnetic surface wave in the m=1 (dipolar) mode to sustain a plasma columnJournal of Applied Physics, 1989
- Conversion of Electromagnetic Waves to Electrostatic Waves in Inhomogeneous PlasmasPhysical Review Letters, 1974
- Space Charge Waves in Cylindrical Plasma ColumnsJournal of Applied Physics, 1959
- Theory of Slots in Rectangular Wave-GuidesJournal of Applied Physics, 1948