Capacitive sensor arrays in dimensional analysis of surfaces
- 1 January 1995
- journal article
- Published by Institute of Electrical and Electronics Engineers (IEEE) in IEEE Transactions on Instrumentation and Measurement
- Vol. 44 (4) , 875-880
- https://doi.org/10.1109/19.392874
Abstract
No abstract availableThis publication has 17 references indexed in Scilit:
- Optimization and analysis of a capacitive contactless angular transducerIEEE Transactions on Instrumentation and Measurement, 1992
- The importance of measurement in technology-based competitionIEEE Transactions on Instrumentation and Measurement, 1990
- Analysis of the performance of the capacitive displacement transducerIEEE Transactions on Instrumentation and Measurement, 1989
- Application of capacitance techniques in sensor designJournal of Physics E: Scientific Instruments, 1986
- The application of capacitance micrometry to the control of Fabry-Perot etalonsJournal of Physics E: Scientific Instruments, 1984
- Displacement transducers based on reactive sensors in transformer ratio bridge circuitsJournal of Physics E: Scientific Instruments, 1982
- Multi-terminal capacitor sensorsJournal of Physics E: Scientific Instruments, 1982
- Some theoretical aspects of error separation techniques in surface metrologyJournal of Physics E: Scientific Instruments, 1976
- The design and some applications of sensitive capacitance micrometersJournal of Physics E: Scientific Instruments, 1973
- Precise Measurement of PlanenessApplied Optics, 1967