Analysis of the performance of the capacitive displacement transducer
- 1 January 1989
- journal article
- Published by Institute of Electrical and Electronics Engineers (IEEE) in IEEE Transactions on Instrumentation and Measurement
- Vol. 38 (4) , 870-875
- https://doi.org/10.1109/19.31006
Abstract
No abstract availableKeywords
This publication has 3 references indexed in Scilit:
- A capacitance based ultra-precision spindle error analyserPrecision Engineering, 1985
- Linear capacitive microdisplacement transduction using phase read-outSensors and Actuators, 1983
- Capacitive transducer for accurate displacement controlIEEE Transactions on Instrumentation and Measurement, 1981