The preparation of (Al2O3)x(SiO2)y thin films using [al(OSiEt3)3]2 as a single‐source precursor
- 1 February 1992
- journal article
- research article
- Published by Wiley in Advanced Materials for Optics and Electronics
- Vol. 1 (1) , 3-15
- https://doi.org/10.1002/amo.860010103
Abstract
No abstract availableKeywords
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