Effect of plasma-surface interactions on the radial variation of H atom density in a hydrogen radio frequency discharge
- 1 August 1994
- journal article
- Published by AIP Publishing in Journal of Applied Physics
- Vol. 76 (3) , 1476-1479
- https://doi.org/10.1063/1.357722
Abstract
No abstract availableThis publication has 24 references indexed in Scilit:
- The Gaseous Electronics Conference radio-frequency reference cell: A defined parallel-plate radio-frequency system for experimental and theoretical studies of plasma-processing dischargesReview of Scientific Instruments, 1994
- Plasma Surface Interactions and Surface Properties for Remote H-Plasma Cleaning of Si(100)MRS Proceedings, 1993
- Role of contaminants in electron cyclotron resonance plasmasJournal of Vacuum Science & Technology A, 1993
- Time-dependent electron kinetics inandfor a wide range of the field frequency including electron-vibration superelastic collisionsPhysical Review E, 1993
- Photoluminescence under pressure of ultrathin AlAs layers grown on GaAs vicinal surfaces: A search for lateral confinement effectsPhysical Review B, 1993
- Effects of surfaces on H-atom concentration in pulsed and continuous dischargesJournal of Vacuum Science & Technology A, 1992
- Temporally resolved laser diagnostic measurements of atomic hydrogen concentrations in RF plasma dischargesPlasma Chemistry and Plasma Processing, 1989
- Simultaneous gas- and plasma-driven hydrogen transport in solidsJournal of Vacuum Science & Technology A, 1987
- The preparation of thin layers of Ge and Si by chemical hydrogen plasma transportSolid-State Electronics, 1968
- The Interstellar Abundance of the Hydrogen Molecule. I. Basic Processes.The Astrophysical Journal, 1963