Evolution of tungsten film deposition induced by focused ion beam
- 27 June 2002
- journal article
- Published by American Vacuum Society in Journal of Vacuum Science & Technology A
- Vol. 20 (4) , 1408-1415
- https://doi.org/10.1116/1.1486230
Abstract
No abstract availableKeywords
This publication has 13 references indexed in Scilit:
- Surface kinetic study of ion-induced chemical vapor deposition of copper for focused ion beam applicationsJournal of Vacuum Science & Technology A, 1997
- Microstructure of gold grown by ion-induced depositionThin Solid Films, 1995
- Mechanism of ion beam induced deposition of goldJournal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, 1994
- Focused-ion beam induced deposition of copperJournal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, 1993
- Focused ion beam induced deposition of tungsten on vertical sidewallsJournal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, 1991
- Focused ion beam induced deposition: a reviewPublished by SPIE-Intl Soc Optical Eng ,1991
- The role of the ion-solid interaction in ion-beam-induced deposition of goldJournal of Applied Physics, 1991
- Focused ion beam induced deposition of platinumJournal of Vacuum Science & Technology B, 1990
- Focused ion beam induced deposition of low-resistivity gold filmsJournal of Vacuum Science & Technology B, 1989
- Summary Abstract: Ion‐beam‐induced deposition of gold by focused and broad‐beam sourcesJournal of Vacuum Science & Technology B, 1987