Stable Thin Film Resistors for Amorphous Silicon Integrated Circuits
- 1 January 1988
- journal article
- Published by Springer Nature in MRS Proceedings
Abstract
No abstract availableKeywords
This publication has 6 references indexed in Scilit:
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- The deposition of cermet films from a powder target by R.F. sputteringThin Solid Films, 1979
- Electronic properties of substitutionally doped amorphous Si and GePhilosophical Magazine, 1976
- Structure and electrical properties of Au-SiO thin film cermetsThin Solid Films, 1972
- Sheet resistance control of thin Cr-SiO filmsThin Solid Films, 1967
- Resistivity and Structure of Cr–SiO Cermet FilmsJournal of Vacuum Science and Technology, 1967