Surface micromachined linear thermal microactuator
- 4 December 2002
- conference paper
- Published by Institute of Electrical and Electronics Engineers (IEEE)
- No. 01631918,p. 629-632
- https://doi.org/10.1109/iedm.1990.237120
Abstract
A linear thermal actuator based on controlled resistive heating of a suspended, micromachined, polysilicon (and silicon carbide) serpentine has been demonstrated. Maximum linear displacements of 1.5 mu m were measured for a polysilicon serpentine microbridge consisting of six bars (500 mu m*10 mu m*2 mu m). These displacements occur when sections of the micro-serpentine have been resistively heated to an average temperature change Delta T of 200 K to 500 K. Although this approach to linear actuation produces only small displacements, these thermally generated forces are significantly larger than those which can be obtained by electrostatic actuation methods. This novel thermal microactuator design is compatible with current IC processing techniques and may have applications for precision linear positioning or mechanical switching.Keywords
This publication has 5 references indexed in Scilit:
- CMOS electrothermal microactuatorsPublished by Institute of Electrical and Electronics Engineers (IEEE) ,2002
- Microfabricated scanning tunneling microscopeIEEE Electron Device Letters, 1989
- Thermally excited silicon microactuatorsIEEE Transactions on Electron Devices, 1988
- Integrated movable micromechanical structures for sensors and actuatorsIEEE Transactions on Electron Devices, 1988
- An IC Piezoresistive Pressure Sensor for Biomedical InstrumentationIEEE Transactions on Biomedical Engineering, 1973