Optical waveguide microscopy
- 24 September 1990
- journal article
- Published by AIP Publishing in Applied Physics Letters
- Vol. 57 (13) , 1286-1288
- https://doi.org/10.1063/1.103461
Abstract
Optical waveguide microscopy is introduced as a novel imaging technique that allows for the microscopic characterization of thin-film samples by using guided optical waves as illumination light source. Excellent thickness (<1 nm) and good lateral resolution (<10 μm) is demonstrated. As a first application we image and analyze the two-dimensional thickness profile of a planar polymeric spun-on waveguide structure.Keywords
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