Formation of carbon-excess SiC from pyrolysis of CH3SiCl3
- 30 April 1975
- journal article
- Published by Elsevier in Journal of Crystal Growth
- Vol. 28 (3) , 395-396
- https://doi.org/10.1016/0022-0248(75)90079-2
Abstract
No abstract availableKeywords
This publication has 3 references indexed in Scilit:
- On the formation of β-SiC from pyrolysis of CH3SiCl3 in hydrogenJournal of Crystal Growth, 1972
- Gasphasenabscheidung im system Silicium-KohlenstoffJournal of the Less Common Metals, 1971
- Deposition and Microstructure of Vapor‐Deposited Silicon CarbideJournal of the American Ceramic Society, 1968