Self-structuring of buried SiO2 precipitate layers during IBS: A computer simulation
- 1 May 1996
- journal article
- Published by Elsevier in Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
- Vol. 112 (1-4) , 223-227
- https://doi.org/10.1016/0168-583x(95)01238-9
Abstract
No abstract availableThis publication has 15 references indexed in Scilit:
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