Modelling of the formation of buried dielectric layers by ion implantation
- 1 March 1992
- journal article
- Published by Elsevier in Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
- Vol. 65 (1-4) , IN2-72
- https://doi.org/10.1016/0168-583x(92)95014-i
Abstract
No abstract availableKeywords
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