Modelling of 18O tracer studies of the oxygen redistribution during formation of SiO2 layers by high dose implantation
- 1 July 1988
- journal article
- Published by Elsevier in Thin Solid Films
- Vol. 161, 333-342
- https://doi.org/10.1016/0040-6090(88)90265-9
Abstract
No abstract availableKeywords
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